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Cryopumps Cryo-Torr®

Number	8	8F	10
Pumping Speeds in  liters/sec.
Air	1500	1500	3000
Water Vapour	4000	4000	9000
Argon	1200	1200	2500
Hydrogen	2500	2200	5000
Capacity in standard liters
Hydrogen (5x10-6 Torr)	12	8	24
Argon	1000	1000	2000

Cryo-Torr® Cryopumps

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On-board® Cryopumps

Number	4F	8	8F	10	10F	400
Pumping Speeds in  liters/sec.
Air	370	1500	1500	3000	3600	6000
Water Vapour	1100	4000	4000	9000	9500	16000
Argon	310	1200	1200	2500	3000	5000
Hydrogen	370	2500	2200	5000	6000	12000
Capacity in standard liters
Hydrogen (5x10-6 Torr)	3	17	12	24	24	42
Argon	210	1000	1000	2000	2000	2500
Regeneration Time, from cold to cold
Second Stage	<1 hr	<1 hr	<1 hr	<1 hr	<1 hr	<1.5 hr
First and Second Stage	75 min	2.5 hr	2.5 hr	2.5 hr	2.5 hr	3 hr

On-Board® Cryopump Systems

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Model 8200 Compressors

• Optimum performance with all 4", 6" and 8" On-Board or Cryo-Torr Cryopumps.
• Air- or water-cooled models.
• Low profile and small footprint.

CTI-Cryogenics® 8200 Compressor

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Model 9600 Compressors

The 9600 Compressor is designed for high reliability, and easy use. It gives outstanding performance with all Cryo-Torr Cryopumps and On-Board Cryopumps. The 9600 can be used for one or several pumps.

• Three-year maintenance-free operation between change of adsorbers.

CTI-Cryogenics® 9600 Compressor

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Model 9700A Compressors

The 9700A Compressor is based on Helix Technology's 9600 Compressor.
With higher helium output, the 9700A Compressor is ideal for operating of more than one pump.

• In many multiple cryopump applications, one 9700A Compressor is enough.

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Adsorbers

Number	Compressor	N0
C21200	SC/8200	8080255K001
C21201	1020R	8080260K001
C21202	MC	8080265K001
C21203	8300	8080280K001
C21204	8500	8080275K001